Intensive efforts; increase reliability; increase the parameters; reduce the size and cost; hardly anyone could predict; quantitative and qualitative changes; branch of science; film technology; semiconductor method; shorten the elements of the scheme; the essence of miniaturization is that; to create schemes with a long service life; extremely high reaction rate; The smaller, the faster; advantage; to expend energy; benefit; reducing the distance between the elements of the circuit; large integrated circuit; microwave integrated circuit; waveguide; transmission line; to shift; image schemes; to expand human capabilities.